APA (7th ed.) Zitazioa

Behringer, U. MEMS Design, Fabrication, Characterization, and Packaging. SPIE Digital Library.

Chicago Style (17th ed.) Zitazioa

Behringer, Uwe. MEMS Design, Fabrication, Characterization, and Packaging. SPIE Digital Library.

MLA (9th ed.) Zitazioa

Behringer, Uwe. MEMS Design, Fabrication, Characterization, and Packaging. SPIE Digital Library.

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