Behringer, U. MEMS Design, Fabrication, Characterization, and Packaging. SPIE Digital Library.
Chicago Style (17th ed.) ZitazioaBehringer, Uwe. MEMS Design, Fabrication, Characterization, and Packaging. SPIE Digital Library.
MLA (9th ed.) ZitazioaBehringer, Uwe. MEMS Design, Fabrication, Characterization, and Packaging. SPIE Digital Library.
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