APA (7th ed.) Citation

Behringer, U. MEMS Design, Fabrication, Characterization, and Packaging. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Behringer, Uwe. MEMS Design, Fabrication, Characterization, and Packaging. SPIE Digital Library.

MLA (9th ed.) Citation

Behringer, Uwe. MEMS Design, Fabrication, Characterization, and Packaging. SPIE Digital Library.

Warning: These citations may not always be 100% accurate.