APA ציטוט

Behringer, U. MEMS Design, Fabrication, Characterization, and Packaging. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Behringer, Uwe. MEMS Design, Fabrication, Characterization, and Packaging. SPIE Digital Library.

ציטוט MLA

Behringer, Uwe. MEMS Design, Fabrication, Characterization, and Packaging. SPIE Digital Library.