Behringer, U. MEMS Design, Fabrication, Characterization, and Packaging. SPIE Digital Library.
Čikaški stil citiranja (17. izdanje)Behringer, Uwe. MEMS Design, Fabrication, Characterization, and Packaging. SPIE Digital Library.
MLA način citiranja (9. izdanje)Behringer, Uwe. MEMS Design, Fabrication, Characterization, and Packaging. SPIE Digital Library.
Upozorenje: Ovi citati možda nisu uvijek 100% točni.