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MEMS Design, Fabrication, Characterization, and Packaging

Detalles Bibliográficos
Outros autores:	Behringer, Uwe
Formato:	Electrónico eBook
Idioma:	inglés
Publicado:	SPIE Digital Library, 4/30/01
Subjects:	Conference papers and proceedings.
Acceso en liña:	Full text available on Research4Life (SPIE Digital Library)

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por: O'Shea, Donald C.