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MEMS Design, Fabrication, Characterization, and Packaging

Dettagli Bibliografici
Altri autori:	Behringer, Uwe
Natura:	Elettronico eBook
Lingua:	inglese
Pubblicazione:	SPIE Digital Library, 4/30/01
Soggetti:	Conference papers and proceedings.
Accesso online:	Full text available on Research4Life (SPIE Digital Library)

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di: O'Shea, Donald C.