APA (7th ed.) Citation

Duparré, A. Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries II. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Duparré, Angela. Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries II. SPIE Digital Library.

MLA (9th ed.) Citation

Duparré, Angela. Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries II. SPIE Digital Library.

Warning: These citations may not always be 100% accurate.