Karam, J. M. Micromachining and Microfabrication Process Technology VII. SPIE Digital Library.
Chicago Style (17th ed.) ZitazioaKaram, Jean Michel. Micromachining and Microfabrication Process Technology VII. SPIE Digital Library.
MLA (9th ed.) ZitazioaKaram, Jean Michel. Micromachining and Microfabrication Process Technology VII. SPIE Digital Library.
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