Karam, J. M. Micromachining and Microfabrication Process Technology VII. SPIE Digital Library.
Chicago Style (17. basım) AtıfKaram, Jean Michel. Micromachining and Microfabrication Process Technology VII. SPIE Digital Library.
MLA (9th ed.) AtıfKaram, Jean Michel. Micromachining and Microfabrication Process Technology VII. SPIE Digital Library.
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