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MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication

Detalhes bibliográficos
Outros Autores:	Helvajian, Henry
Formato:	Recurso Electrónico livro electrónico
Idioma:	inglês
Publicado em:	SPIE Digital Library, 10/1/01
Assuntos:	Conference papers and proceedings.
Acesso em linha:	Full text available on Research4Life (SPIE Digital Library)

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