APA (7th ed.) Citation

Chiao, J. Device and Process Technologies for MEMS and Microelectronics II. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Chiao, Jung-Chih. Device and Process Technologies for MEMS and Microelectronics II. SPIE Digital Library.

MLA (9th ed.) Citation

Chiao, Jung-Chih. Device and Process Technologies for MEMS and Microelectronics II. SPIE Digital Library.

Warning: These citations may not always be 100% accurate.