APA (7th ed.) Citation

Tien, N. Micromachining and Microfabrication Process Technology and Devices. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Tien, Norman. Micromachining and Microfabrication Process Technology and Devices. SPIE Digital Library.

MLA (9th ed.) Citation

Tien, Norman. Micromachining and Microfabrication Process Technology and Devices. SPIE Digital Library.

Warning: These citations may not always be 100% accurate.