Tien, N. Micromachining and Microfabrication Process Technology and Devices. SPIE Digital Library.
Chicagoスタイル(17版)引用形式Tien, Norman. Micromachining and Microfabrication Process Technology and Devices. SPIE Digital Library.
MLA(9版)引用形式Tien, Norman. Micromachining and Microfabrication Process Technology and Devices. SPIE Digital Library.
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