Tien, N. Micromachining and Microfabrication Process Technology and Devices. SPIE Digital Library.
Chicago Style (17. basım) AtıfTien, Norman. Micromachining and Microfabrication Process Technology and Devices. SPIE Digital Library.
MLA (9th ed.) AtıfTien, Norman. Micromachining and Microfabrication Process Technology and Devices. SPIE Digital Library.
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