Micromachining and Microfabrication Process Technology and Devices

Bibliografiske detaljer
Andre forfattere: Tien, Norman
Format: Electronisk eBog
Sprog:engelsk
Udgivet: SPIE Digital Library, 10/15/01
Fag:
Online adgang:Full text available on Research4Life (SPIE Digital Library)
Beskrivelse
Emne beskrivelse:<strong>On-Campus Access Only (IP based access)</strong>
Fysisk beskrivelse:1 online resource
Format:Mode of access: Internet
ISBN:9780819443403
Adgang:Electronic access restricted to authorized AUW faculty, staff and students