Herr, D. Metrology, Inspection, and Process Control for Microlithography XVI. SPIE Digital Library.
Cita Chicago (17th ed.)Herr, Daniel. Metrology, Inspection, and Process Control for Microlithography XVI. SPIE Digital Library.
Cita MLA (9th ed.)Herr, Daniel. Metrology, Inspection, and Process Control for Microlithography XVI. SPIE Digital Library.
Atenció: Aquestes cites poden no estar 100% correctes.