Cita APA

Herr, D. Metrology, Inspection, and Process Control for Microlithography XVI. SPIE Digital Library.

Citación estilo Chicago

Herr, Daniel. Metrology, Inspection, and Process Control for Microlithography XVI. SPIE Digital Library.

Cita MLA

Herr, Daniel. Metrology, Inspection, and Process Control for Microlithography XVI. SPIE Digital Library.

Warning: These citations may not always be 100% accurate.