Starikov, A. Design, Process Integration, and Characterization for Microelectronics. SPIE Digital Library.
Cita Chicago (17th ed.)Starikov, Alexander. Design, Process Integration, and Characterization for Microelectronics. SPIE Digital Library.
Cita MLA (9th ed.)Starikov, Alexander. Design, Process Integration, and Characterization for Microelectronics. SPIE Digital Library.
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