Kawahira, H. Photomask and Next-Generation Lithography Mask Technology IX. SPIE Digital Library.
Style de citation Chicago (17e éd.)Kawahira, Hiroichi. Photomask and Next-Generation Lithography Mask Technology IX. SPIE Digital Library.
Style de citation MLA (9e éd.)Kawahira, Hiroichi. Photomask and Next-Generation Lithography Mask Technology IX. SPIE Digital Library.
Attention : ces citations peuvent ne pas être correctes à 100%.