APA (7e ed.) Bronvermelding

Kawahira, H. Photomask and Next-Generation Lithography Mask Technology IX. SPIE Digital Library.

Chicago (17e ed.) Bronvermelding

Kawahira, Hiroichi. Photomask and Next-Generation Lithography Mask Technology IX. SPIE Digital Library.

MLA (9e ed.) Bronvermelding

Kawahira, Hiroichi. Photomask and Next-Generation Lithography Mask Technology IX. SPIE Digital Library.

Let op: Deze citaties zijn niet altijd 100% accuraat.