Behringer, U. 18th European Conference on Mask Technology for Integrated Circuits and Microcomponents. SPIE Digital Library.
Tohutoru Kātū Chicago (17th ed.)Behringer, Uwe. 18th European Conference on Mask Technology for Integrated Circuits and Microcomponents. SPIE Digital Library.
Tohutoro MLA (9th ed.)Behringer, Uwe. 18th European Conference on Mask Technology for Integrated Circuits and Microcomponents. SPIE Digital Library.
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