Behringer, U. 18th European Conference on Mask Technology for Integrated Circuits and Microcomponents. SPIE Digital Library.
Citace podle Chicago (17th ed.)Behringer, Uwe. 18th European Conference on Mask Technology for Integrated Circuits and Microcomponents. SPIE Digital Library.
Citace podle MLA (9th ed.)Behringer, Uwe. 18th European Conference on Mask Technology for Integrated Circuits and Microcomponents. SPIE Digital Library.
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