Behringer, U. 18th European Conference on Mask Technology for Integrated Circuits and Microcomponents. SPIE Digital Library.
Chicago Style (17th ed.) ZitazioaBehringer, Uwe. 18th European Conference on Mask Technology for Integrated Circuits and Microcomponents. SPIE Digital Library.
MLA (9th ed.) ZitazioaBehringer, Uwe. 18th European Conference on Mask Technology for Integrated Circuits and Microcomponents. SPIE Digital Library.
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