Behringer, U. 18th European Conference on Mask Technology for Integrated Circuits and Microcomponents. SPIE Digital Library.
Chicago (17e ed.) BronvermeldingBehringer, Uwe. 18th European Conference on Mask Technology for Integrated Circuits and Microcomponents. SPIE Digital Library.
MLA (9e ed.) BronvermeldingBehringer, Uwe. 18th European Conference on Mask Technology for Integrated Circuits and Microcomponents. SPIE Digital Library.
Let op: Deze citaties zijn niet altijd 100% accuraat.