APA (7th ed.) Citation

Gu, Z. Surface Scattering and Diffraction for Advanced Metrology II. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Gu, Zu-Han. Surface Scattering and Diffraction for Advanced Metrology II. SPIE Digital Library.

MLA (9th ed.) Citation

Gu, Zu-Han. Surface Scattering and Diffraction for Advanced Metrology II. SPIE Digital Library.

Warning: These citations may not always be 100% accurate.