APA ציטוט

Herr, D. Metrology, Inspection, and Process Control for Microlithography XVII. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Herr, Daniel. Metrology, Inspection, and Process Control for Microlithography XVII. SPIE Digital Library.

ציטוט MLA

Herr, Daniel. Metrology, Inspection, and Process Control for Microlithography XVII. SPIE Digital Library.