Herr, D. Metrology, Inspection, and Process Control for Microlithography XVII. SPIE Digital Library.
Citazione stile Chigago Style (17a edizione)Herr, Daniel. Metrology, Inspection, and Process Control for Microlithography XVII. SPIE Digital Library.
Citatione MLA (9a ed.)Herr, Daniel. Metrology, Inspection, and Process Control for Microlithography XVII. SPIE Digital Library.
Attenzione: Queste citazioni potrebbero non essere precise al 100%.