APA citiranje

Herr, D. Metrology, Inspection, and Process Control for Microlithography XVII. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Herr, Daniel. Metrology, Inspection, and Process Control for Microlithography XVII. SPIE Digital Library.

MLA citiranje

Herr, Daniel. Metrology, Inspection, and Process Control for Microlithography XVII. SPIE Digital Library.

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