APA (7. basım) Alıntı

Herr, D. Metrology, Inspection, and Process Control for Microlithography XVII. SPIE Digital Library.

Chicago Style (17. basım) Atıf

Herr, Daniel. Metrology, Inspection, and Process Control for Microlithography XVII. SPIE Digital Library.

MLA (9th ed.) Atıf

Herr, Daniel. Metrology, Inspection, and Process Control for Microlithography XVII. SPIE Digital Library.

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