APA (7th ed.) Citation

Yen, A. Optical Microlithography XVI. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Yen, Anthony. Optical Microlithography XVI. SPIE Digital Library.

MLA (9th ed.) Citation

Yen, Anthony. Optical Microlithography XVI. SPIE Digital Library.

Warning: These citations may not always be 100% accurate.