APA (7th ed.) Citation

Tobin, K. Process and Materials Characterization and Diagnostics in IC Manufacturing. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Tobin, Kenneth. Process and Materials Characterization and Diagnostics in IC Manufacturing. SPIE Digital Library.

MLA (9th ed.) Citation

Tobin, Kenneth. Process and Materials Characterization and Diagnostics in IC Manufacturing. SPIE Digital Library.

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