Tobin, K. Process and Materials Characterization and Diagnostics in IC Manufacturing. SPIE Digital Library.
Cita Chicago Style (17a ed.)Tobin, Kenneth. Process and Materials Characterization and Diagnostics in IC Manufacturing. SPIE Digital Library.
Cita MLA (9a ed.)Tobin, Kenneth. Process and Materials Characterization and Diagnostics in IC Manufacturing. SPIE Digital Library.
Precaución: Estas citas no son 100% exactas.