Cita APA

Tanabe, H. Photomask and Next-Generation Lithography Mask Technology X. SPIE Digital Library.

Citación estilo Chicago

Tanabe, Hiroyoshi. Photomask and Next-Generation Lithography Mask Technology X. SPIE Digital Library.

Cita MLA

Tanabe, Hiroyoshi. Photomask and Next-Generation Lithography Mask Technology X. SPIE Digital Library.

Warning: These citations may not always be 100% accurate.