Gorecki, C. Microsystems Engineering: Metrology and Inspection III. SPIE Digital Library.
Cita Chicago (17th ed.)Gorecki, Christophe. Microsystems Engineering: Metrology and Inspection III. SPIE Digital Library.
Cita MLA (9th ed.)Gorecki, Christophe. Microsystems Engineering: Metrology and Inspection III. SPIE Digital Library.
Atenció: Aquestes cites poden no estar 100% correctes.