Gorecki, C. Microsystems Engineering: Metrology and Inspection III. SPIE Digital Library.
Chicago Style (17. basım) AtıfGorecki, Christophe. Microsystems Engineering: Metrology and Inspection III. SPIE Digital Library.
MLA (9th ed.) AtıfGorecki, Christophe. Microsystems Engineering: Metrology and Inspection III. SPIE Digital Library.
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