Motamedi, M. MOEMS: Micro-Opto-Electro-Mechanical Systems. SPIE Digital Library.
Tohutoru Kātū Chicago (17th ed.)Motamedi, Manouchehr. MOEMS: Micro-Opto-Electro-Mechanical Systems. SPIE Digital Library.
Tohutoro MLA (9th ed.)Motamedi, Manouchehr. MOEMS: Micro-Opto-Electro-Mechanical Systems. SPIE Digital Library.
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