APA (7th ed.) Citation

Kley, E. Lithographic and Micromachining Techniques for Optical Component Fabrication II. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Kley, Ernst-Bernhard. Lithographic and Micromachining Techniques for Optical Component Fabrication II. SPIE Digital Library.

MLA (9th ed.) Citation

Kley, Ernst-Bernhard. Lithographic and Micromachining Techniques for Optical Component Fabrication II. SPIE Digital Library.

Warning: These citations may not always be 100% accurate.