Chiao, J. Device and Process Technologies for MEMS, Microelectronics, and Photonics III. SPIE Digital Library.
Chicago Style (17th ed.) ZitazioaChiao, Jung-Chih. Device and Process Technologies for MEMS, Microelectronics, and Photonics III. SPIE Digital Library.
MLA (9th ed.) ZitazioaChiao, Jung-Chih. Device and Process Technologies for MEMS, Microelectronics, and Photonics III. SPIE Digital Library.
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