Chiao, J. Device and Process Technologies for MEMS, Microelectronics, and Photonics III. SPIE Digital Library.
Cita Chicago Style (17a ed.)Chiao, Jung-Chih. Device and Process Technologies for MEMS, Microelectronics, and Photonics III. SPIE Digital Library.
Cita MLA (9a ed.)Chiao, Jung-Chih. Device and Process Technologies for MEMS, Microelectronics, and Photonics III. SPIE Digital Library.
Precaución: Estas citas no son 100% exactas.