Tanner, D. Reliability, Testing, and Characterization of MEMS/MOEMS III. SPIE Digital Library.
Tohutoru Kātū Chicago (17th ed.)Tanner, Danelle. Reliability, Testing, and Characterization of MEMS/MOEMS III. SPIE Digital Library.
Tohutoro MLA (9th ed.)Tanner, Danelle. Reliability, Testing, and Characterization of MEMS/MOEMS III. SPIE Digital Library.
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