Tanner, D. Reliability, Testing, and Characterization of MEMS/MOEMS III. SPIE Digital Library.
Chicago Style (17. basım) AtıfTanner, Danelle. Reliability, Testing, and Characterization of MEMS/MOEMS III. SPIE Digital Library.
MLA (9th ed.) AtıfTanner, Danelle. Reliability, Testing, and Characterization of MEMS/MOEMS III. SPIE Digital Library.
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