Janson, S. MEMS/MOEMS Components and Their Applications. SPIE Digital Library.
Chicago-referens (17:e uppl.)Janson, Siegfried. MEMS/MOEMS Components and Their Applications. SPIE Digital Library.
MLA-referens (9:e uppl.)Janson, Siegfried. MEMS/MOEMS Components and Their Applications. SPIE Digital Library.
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