Silver, R. Metrology, Inspection, and Process Control for Microlithography XVIII. SPIE Digital Library.
Citación estilo ChicagoSilver, Richard. Metrology, Inspection, and Process Control for Microlithography XVIII. SPIE Digital Library.
Cita MLASilver, Richard. Metrology, Inspection, and Process Control for Microlithography XVIII. SPIE Digital Library.
Warning: These citations may not always be 100% accurate.