APA citiranje

Silver, R. Metrology, Inspection, and Process Control for Microlithography XVIII. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Silver, Richard. Metrology, Inspection, and Process Control for Microlithography XVIII. SPIE Digital Library.

MLA citiranje

Silver, Richard. Metrology, Inspection, and Process Control for Microlithography XVIII. SPIE Digital Library.

Opozorilo: Ti citati niso vedno 100% točni.