APA (7. basım) Alıntı

Silver, R. Metrology, Inspection, and Process Control for Microlithography XVIII. SPIE Digital Library.

Chicago Style (17. basım) Atıf

Silver, Richard. Metrology, Inspection, and Process Control for Microlithography XVIII. SPIE Digital Library.

MLA (9th ed.) Atıf

Silver, Richard. Metrology, Inspection, and Process Control for Microlithography XVIII. SPIE Digital Library.

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