Advances in Resist Technology and Processing XXI

Bibliografiska uppgifter
Övriga skapare: Sturtevant, John
Materialtyp: Elektronisk E-bok
Språk:engelska
Publicerad: SPIE Digital Library, 1/1/04
Ämnen:
Länkar:Full text available on Research4Life (SPIE Digital Library)
Beskrivning
Beskrivning:<strong>On-Campus Access Only (IP based access)</strong>
Fysisk beskrivning:1 online resource
Materialtyp:Mode of access: Internet
ISBN:9780819452894
Tillgång:Electronic access restricted to authorized AUW faculty, staff and students