Komuro, M. Photomask and Next-Generation Lithography Mask Technology XI. SPIE Digital Library.
Chicago Style (17th ed.) CitationKomuro, Masanori. Photomask and Next-Generation Lithography Mask Technology XI. SPIE Digital Library.
MLA citiranjeKomuro, Masanori. Photomask and Next-Generation Lithography Mask Technology XI. SPIE Digital Library.
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