Urey, H. MEMS, MOEMS, and Micromachining. SPIE Digital Library.
Chicagoスタイル(17版)引用形式Urey, Hakan. MEMS, MOEMS, and Micromachining. SPIE Digital Library.
MLA(9版)引用形式Urey, Hakan. MEMS, MOEMS, and Micromachining. SPIE Digital Library.
警告: この引用は必ずしも正確ではありません.