APA (7th ed.) Citation

Ma, Z. MEMS/MOEMS Technologies and Applications II. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Ma, Zhichun. MEMS/MOEMS Technologies and Applications II. SPIE Digital Library.

MLA (9th ed.) Citation

Ma, Zhichun. MEMS/MOEMS Technologies and Applications II. SPIE Digital Library.

Warning: These citations may not always be 100% accurate.