APA (7th ed.) Citation

Wang, Y. Advanced Microlithography Technologies. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Wang, Yangyuan. Advanced Microlithography Technologies. SPIE Digital Library.

MLA (9th ed.) Citation

Wang, Yangyuan. Advanced Microlithography Technologies. SPIE Digital Library.

Warning: These citations may not always be 100% accurate.