Wang, Y. Advanced Microlithography Technologies. SPIE Digital Library.
Chicago-čujuhus (17. p.)Wang, Yangyuan. Advanced Microlithography Technologies. SPIE Digital Library.
MLA-čujuhus (9. p.)Wang, Yangyuan. Advanced Microlithography Technologies. SPIE Digital Library.
Muitte dárkkistit čujuhemiid riektatvuođa, ovdal go geavahat daid iežat deavsttas.